May 4, 2016
Griffin Motion has introduced its continuous travel RTS-DD Series rotary motion platform. It exhibits angular accuracy of 30 arcsec, repeatability of 3 arcsec, and a resolution of 0.324 arcsec, in addition to high angular velocity (480deg/s), axial and radial run-out (5µm).
RTS-DD series rotary stages are ideal for use in a variety of laboratory, factory automation, and semiconductor processing applications, including: inspection, laser marking and machining, optical positioning, wafer alignment, and rate table, pan-and-tilt and beam steering operations.
According to a company press release, RTS-DD series has a low-profile design that measures 5.24x4.33x2.17 in., and a brushless direct-drive servo motor that eliminates backlash and improves reliability by eliminating sliding friction throughout the stage. The series also features a high-resolution optical encoder with a precision index mark for homing, and a 30mm through-bore to enable the convenient routing of vacuum or high voltage lines for a wide range of wafer chucks.
For more information visit Griffin Motion.
Sources: Press materials received from the company and additional information gleaned from the company’s website.