Physik Instrumente Ships N-565 Linear Stage Series

Physik Instrumente (PI) has introduced the N-565 linear stage series, which incorporates piezoelectric stepping drives. The drive principle enables repeatability in the range of a few nanometers, high guiding accuracy and high force in a single compact unit, a press release states.

The linear stages therefore fulfill positioning requirements, for example, samples, optics or mechanical components in microscopy, in the semiconductor industry, for laser set-ups or applications in a vacuum.

According to the company, these stages have a width of 65 mm, a height of only 20 mm, and work with travel ranges of 13, 26 or 52 mm. Depending on the travel range, the length is 80, 110, and 160 mm. As measuring system for position control, PI uses an internally developed optical linear encoder that is based on an integrated Mach-Zehnder interferometer. This measuring principle enables a resolution of 0.5 nm and a minimum incremental motion of 2 nm.

The piezoelectric drive is self-locking; if the target position is reached or the system is switched off, the positioning unit maintains the position without current and without generating heat. The holding force of the positioning stage is 10 N, the maximum velocity is 10 mm/s.

For more information, visit PI.

Sources: Press materials received from the company and additional information gleaned from the company’s website.