Siemens has acquired Canopus AI, a company focused on computational and AI-driven metrology solutions, enabling semiconductor manufacturers to achieve more precision in wafer and mask inspection processes. This acquisition expands Siemens' semiconductor design and manufacturing digital thread by integrating additional metrology technologies, enhanced with advanced AI capabilities.
Canopus AI’s AI-powered solutions complement Siemens' existing portfolio, providing semiconductor manufacturers with intelligent inspection and measurement capabilities.
“The acquisition of Canopus AI exemplifies Siemens' commitment to leveraging industrial AI to solve critical challenges in semiconductor manufacturing,” says Tony Hemmelgarn, president and CEO, Siemens Digital Industries Software. “By combining the computational lithography and manufacturing physics simulation capability in our Calibre portfolio with Canopus-AI’s advanced metrology and inspection technologies, we are creating a differentiated, end-to-end EDA digital thread that improves the fidelity of printed wafer patterns, accelerates yield ramp and reduces time-to-volume for advanced nodes. This integration further advances our vision of a comprehensive, high-accuracy, semiconductor manufacturing digital twin, enabling sub-nanometer process control and mask development.”
Founded in 2021 and based in Grenoble, France, Canopus AI is a software and AI company dedicated to wafer and mask metrology and inspection. Canopus AI has developed 'Metrospection,' an approach that enhances metrology and inspection workflows with AI. This software framework uses AI to help chip designers and manufacturers meet precision requirements of advanced technology nodes.
“We are delighted to join Siemens and bring the power of AI-enabled metrology in the semiconductor industry to a broader audience as part of Siemens’ EDA community of users,” says Joël Alanis, chief executive officer, Canopus AI. “Together, we’ll empower innovators pushing the boundaries of semiconductor design and manufacturing with robust wafer and mask metrology and inspection and help them to meet the challenges of the rapidly changing semiconductor industry.”
The transaction closed on January 12, 2026. To learn more, visit https://blogs.sw.siemens.com/calibre/2026/02/04/siemens-acquires-canopusai/
Sources: Press materials received from the company and additional information gleaned from the company’s website.


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