Nikon Metrology Announces Three New Products at Semicon West 2010

By DE Editors

Nikon Metrology, Inc. has introduced the Eclipse L300N/L300ND, a FPD/LSI inspection microscope with an enhanced Epi-Fluorescence function enabling 365nm UV excitation for the inspection of semiconductor resist residues on 300mm wafers and organic electroluminescence displays (OLEDs). The system also incorporates Nikon’s infinity optics, CFI60, offering both image brightness through high NA and wider sample range and access with long working distance.

The motorized universal nosepiece on the Eclipse L300/L300N incorporates an anti-flash mechanism, which engages when the nosepiece is rotated to protect the operator’s eye. In addition, a centering mechanism is possible at three nosepiece positions to minimize image shifts when changing the objective magnification. USB interface is available for nosepiece position output to DS-L2 and U2 as well as control of nosepiece through Nikon’s NIS-Elements software.

The company also announced that is will distribute Lasertec’s Optelics H1200, a color confocal microscope with a 3-CCD sensor system that can acquire 12-million pixel color images. Its optics provide for high-resolution height measurement over a range of magnifications, as well as allowing samples of semi-sphere or samples with V-shape trench to be expressed in 3D without any noise.

The system includes a variable frame rate setting from 0.1 frames per second to 120 frames per second, making the microscope adaptable to purposes from high-resolution observation to high-speed measurement.

Nikon Metrology’s new Confocal NEXIV-K6555 incorporates the latest Confocal, image processing and Through the Lens (TTL) laser technologies for non-contact 3D measurements on larger size substrates, probe cards and other applications requiring large stage travel.

Nikon designed the Confocal NEXIV VMZ-K6555 with longer XY travel (650mm x 550mm) to cover the non-contact 3D measurement requirements of larger substrates, such as recent cutting-edge interposer substrates and probe cards. In addition, the newly developed ZC objective lenses for height measurement can obtain height data for every pixel in the field of view in a single scan, according to the company.

For more information, visit Nikon Metrology.

Sources: Press materials received from the company and additional information gleaned from the company's website.